Inspection apparatus, inspection system, and inspection method

ABSTRACT

An inspection apparatus includes a spectroscopic imager that spectroscopically separates light from a predetermined imaging range of an inspection object into light of a plurality of wavelengths and images spectroscopic images of each of the wavelengths, a shape inspection unit that inspects a shape of the inspection object using a spectroscopic image of a predetermined wavelength among the spectroscopic images of each of the wavelengths, and a color inspection unit that inspects a color of the inspection object using the spectroscopic images of each of the wavelengths.

BACKGROUND 1. Technical Field

The present invention relates to an inspection apparatus, an inspectionsystem, and an inspection method.

2. Related Art

In the related art, there is known an inspection apparatus that inspectsproducts (for example, see JP-A-2011-226814 and JP-A-2003-215053).

The inspection apparatus disclosed in JP-A-2011-226814 irradiates aninspection object with light from an illumination unit passed through afilter in which a plurality of pattern filters are overlapped and imagesthe light reflected by the inspection object with an imaging unit (RGBcamera). A filtering process of each color of RGB and a frequencyfiltering process are performed on the imaged image, and presence orabsence of unevenness is determined from the obtained image.

The inspection apparatus disclosed in JP-A-2003-215053 images aspectroscopic image of the inspection object with a spectroscopic cameraand measures a wavelength of color of every single pixel. The wavelengthof each pixel is converted into a wavelength measured value, and colorunevenness of the inspection object is detected.

Depending on the inspection object, it is necessary to inspect both thepresence or absence of unevenness on a surface of the inspection objectand the color unevenness of the inspection object. In the related art,in such a case, a step of inspecting the unevenness of the inspectionobject using the image imaged by the RGB camera as disclosed inJP-A-2011-226814 and a step of inspecting the color of a product usingthe spectroscopic measurement result of the spectroscopic camera asdisclosed in JP-A-2003-215053 have been performed in separate steps.That is, the imaged image of the inspection object irradiated withpattern light used for the unevenness inspection and the spectroscopicimage used for the color inspection are different images. Therefore, itis necessary to acquire images used for the respective inspections inseparate steps, and there is a problem that the number of steps relatedto manufacturing increases.

SUMMARY

An advantage of some aspects of the invention is to provide aninspection apparatus, an inspection system, and an inspection methodcapable of quickly performing inspection of a plurality of items for aninspection object.

An inspection apparatus according to an application example of theinvention includes: a spectroscopic imaging unit that spectroscopicallyseparates light from a predetermined imaging range of an inspectionobject into light of a plurality of wavelengths and images spectroscopicimages of each of the wavelengths; a shape inspection unit that inspectsa shape of the inspection object using a spectroscopic image of apredetermined wavelength among the spectroscopic images of each of thewavelengths; and a color inspection unit that inspects a color of theinspection object using the spectroscopic images of each of thewavelengths.

Here, the inspection object of the application example of the inventionincludes an object which is provided with a light source on a rearsurface of the inspection object and transmits the light from the lightsource (such as film) and does not need to emit illumination light fromthe spectroscopic imaging unit in addition to an object that emits lightby self-illumination (such as display panel).

In the application example, the spectroscopic imaging unitspectroscopically separates the light from the inspection object into aplurality of wavelengths (spectral wavelengths) and images spectroscopicimages for each of the spectral wavelengths, respectively, and the shapeinspection unit performs the shape inspection of the inspection objectusing any one of the imaged spectroscopic images. The color inspectionunit performs the color inspection of the inspection object using theplurality of imaged spectroscopic images.

That is, in the application example, the spectroscopic image of theinspection object which emits light by self-illumination or transmitslight from a rear surface is imaged so that, in a case where theinspection object has an abnormality such as scratch on a surface oradhesion of a foreign substance, a light quantity is changed due to thescattering of light at the abnormality portion. Accordingly, the shapeinspection unit can easily perform the shape inspection based on any oneof the imaged spectroscopic images without emitting illumination lighthaving a specific pattern such as a fringe pattern with respect to theinspection object. Since spectroscopic images for the plurality ofspectral wavelengths can be obtained, the color inspection unit canobtain spectrum at each position of the inspection object from thesespectroscopic images and perform color measurement (color inspection)with high accuracy.

In the application example, both the shape inspection by the shapeinspection unit and the color inspection by the color inspection unitare performed using the spectroscopic images imaged by the spectroscopicimaging unit. Accordingly, there is no need to acquire the image forperforming the shape inspection and the image for performing the colorinspection at separate processes, and the number of processes related tothe inspection can be reduced.

In the inspection apparatus according to the application example, it ispreferable that the spectroscopic imaging unit includes a variablewavelength interference filter that includes a pair of reflection filmsopposite to each other and a gap changing unit which changes a gap sizebetween the pair of reflection films, and an imaging element that imageslight transmitted through the variable wavelength interference filter.

In the application example with this configuration, the spectroscopicimaging unit includes the variable wavelength interference filter and animaging device. The variable wavelength interference filter has a simpleconfiguration in which a pair of reflection films are disposed oppositeto each other, and for example, can be reduced in size and weightcompared to spectroscopic filters such as an acousto-optic tunablefilter (AOTF) or a liquid crystal tunable filter (LCTF). Accordingly,the freedom degree of the disposition space of the spectroscopic imagingunit is improved, so that it is possible to dispose the spectroscopicimaging unit at any position in a manufacturing factory and the like. Itis also possible to easily hold the spectroscopic imaging unit with arobot arm or the like.

In the inspection apparatus according to the application example, it ispreferable that an imaging holding arm that holds the spectroscopicimaging unit and is relatively movable with respect to the inspectionobject is further included.

In the application example with this configuration, the spectroscopicimaging unit is held by the imaging holding arm, and the imaging holdingarm is relatively movable with respect to the inspection object.Therefore, it is possible to move the spectroscopic imaging unit withrespect to the inspection object, and it is possible to image an imageof the inspection object from any directions.

In the inspection apparatus according to the application example, it ispreferable that the spectroscopic imaging unit is held by the imagingholding arm via a buffer material.

As described above, in a case where the spectroscopic imaging unit isheld by the imaging holding arm movable with respect to the inspectionobject, the vibration according to the driving of the imaging holdingarm may be transmitted to the spectroscopic imaging unit. On the otherhand, in the application example, since the spectroscopic imaging unitis held by the imaging holding arm via a buffer material, thetransmission of the vibration from the imaging holding arm to thespectroscopic imaging unit can be suppressed, and thereby the spectralaccuracy can be improved.

In the inspection apparatus according to the application example, it ispreferable that a transport arm that transports the inspection object isfurther included, and in which the transport arm has a gripping portionthat grips the inspection object, and an imaging holding portion thatholds the spectroscopic imaging unit at a position opposite to theinspection object gripped by the gripping portion.

In the application example with this configuration, it is possible togrip the inspection object by the gripping portion of the transport armand transport the inspection object to the predetermined position. Thetransport arm includes the imaging holding portion which holds thespectroscopic imaging unit at a position opposed to the inspectionobject gripped by the gripping portion. Therefore, it is possible toimage the spectroscopic image of the inspection object by thespectroscopic imaging unit by the transport arm while transporting theinspection object.

In the inspection apparatus according to the application example, it ispreferable that the spectroscopic imaging unit is held by the imagingholding portion via a buffer material.

As described above, while the inspection object is gripped to betransported by the transport arm, in a case where the spectroscopicimage of the inspection object is imaged by the spectroscopic imagingunit, the vibration caused by the driving of the transport arm may betransmitted to the spectroscopic imaging unit. On the other hand, in theapplication example, since the spectroscopic imaging unit is holding theimaging holding portion via a buffer material, the transmission of thevibration from the transport arm to the spectroscopic imaging unit canbe suppressed, and thereby the spectral accuracy can be improved.

In the inspection apparatus according to the application example, it ispreferable that a transport arm that transports the inspection object, atransport controller that controls driving of the transport arm, and avision controller that is provided with a spectroscopic control unitwhich controls the spectroscopic imaging unit, the shape inspectionunit, and the color inspection unit are further included.

In the application example with this configuration, the transport armwhich transports the inspection object is provided at the inspectionapparatus so that the driving of the transport arm is controlled by thetransport controller. In the inspection apparatus, the vision controlleris provided as a separate portion from the transport controller, and thespectroscopic control unit which controls the spectroscopic imagingunit, the shape inspection unit, and the color inspection unit areprovided in the vision controller.

The versatility is enhanced by controlling the transport control of thetransport arm by the transport controller and the inspection of theinspection object by the vision controller with separate configuration,and thereby the inspection apparatus is applicable to variousmanufacturing lines.

In the inspection apparatus according to the application example, it ispreferable that the transport controller controls the driving of thetransport arm based on an input signal input from the vision controllerand transports the inspection object to a position according to a shapeinspection result of the shape inspection unit and a color inspectionresult of the color inspection unit.

In the application example with this configuration, both the shapeinspection and the color inspection are performed based on thespectroscopic image obtained by imaging the spectroscopic image by thespectroscopic imaging unit, and thereby, the shape inspection result andthe color inspection result can be quickly obtained. Accordingly, whenthe input signal including the inspection result is input from thevision controller, the transport controller can quickly transport theinspection object to the position according to the inspection result.

In the inspection apparatus according to the application example, it ispreferable that the transport controller transports the inspectionobject to a first transport position in a case where a defect having apredetermined size or larger is detected by the shape inspection unit,transports the inspection object to a second transport position in acase where a defect having the predetermined size or larger is notdetected by the shape inspection unit and chromaticity detected by thecolor inspection unit is out of a predetermined reference range, andtransports the inspection object to a third transport position in a casewhere a defect having the predetermined size or larger is not detectedby the shape inspection unit and chromaticity detected by the colorinspection unit is within the reference range.

In the application example with this configuration, in a case where adefect having a predetermined size or larger is detected in the shapeinspection result of the shape inspection unit, the transport controllertransports the inspection object to the first transport position fordetermining the inspection object as a defective product, for example.In a case where no defect is detected in the shape inspection result ofthe shape inspection unit and the chromaticity is inspected to be out ofthe predetermined reference range by the color inspection unit (in acase where it is determined that there is an abnormality in color), thetransport controller transports the inspection object to the secondtransport position for determining the inspection object as a correctiontarget, for example. In a case where no defect is detected in the shapeinspection result of the shape inspection unit and it is determined thatthere is no abnormality in color by the color inspection unit, thetransport controller transports the inspection object to the thirdtransport position for determining the inspection object as a goodproduct, for example. In the application example, the inspection objectcan be efficiently classified based on the inspection result of theshape inspection unit and the color inspection unit.

In the inspection apparatus according to the application example, it ispreferable that a reference object with known optical properties withrespect to a wavelength of the light spectroscopically separated by thespectroscopic imaging unit is further included.

In the application example with this configuration, since the referenceobject is provided, the calibration of the spectroscopic imaging unitcan be performed prior to the imaging process of the spectroscopic imageof the inspection object by the spectroscopic imaging unit, and aspectroscopic image with high accuracy can be obtained.

In the inspection apparatus according to the application example, it ispreferable that the shape inspection unit inspects the shape using thespectroscopic image of a shortest wavelength among the spectroscopicimages of each of the wavelengths.

In a case where there is unevenness (defect) such as a scratch on thesurface of the inspection object, since the light is scattered by theunevenness when the inspection object is self-illuminated, when thespectroscopic image is imaged, the luminance of the unevenness portionis higher than the other portions. In the shape inspection unit of theapplication example, it is possible to inspect whether or not there isan abnormality in the shape of the inspection object by detecting such alight scattering position. At this time, the shape inspection unitperforms the shape inspection using the spectroscopic image of theshortest wavelength among the plurality of spectroscopic images. In acase where light is scattered by the unevenness on the surface of theinspection object, the shorter the wavelength of the light, the higherthe light intensity of the scattered light. Accordingly, the shapeinspection unit can detect the unevenness on the surface of theinspection object with high accuracy by performing the shape inspectionby the spectroscopic image of the shortest wavelength.

In the inspection apparatus according to the application example, theshape inspection unit may inspect the shape using the spectroscopicimage corresponding to a wavelength at which a light quantity of thelight from the inspection object peaks.

The shape inspection unit of the application example performs the shapeinspection using the spectroscopic image corresponding to the wavelengthat which the light quantity peaks when the inspection object emits lightamong the plurality of spectroscopic images. With such a wavelength, thelight quantity of the light received by the spectroscopic imaging unitis large, and in a case where the scattering of light occurs, the lightquantity of the scattered light may increase. Therefore, the shapeinspection unit can detect the unevenness on the surface of theinspection object with high accuracy.

An inspection system according to another application example of theinvention includes the above-described inspection apparatus and atransport mechanism that transports the inspection object inspected bythe inspection apparatus to a predetermined position.

In the application example, as described above, there is no need toimage an image for the shape inspection and an image for the colorinspection separately. That is, it is possible to perform both the shapeinspection and the color inspection using the spectroscopic images ofeach of the wavelengths imaged by the spectroscopic imaging unit, thatis, the spectroscopic image for the color inspection. Therefore, theshape inspection and the color inspection with respect to the inspectionobject can be performed quickly, and it is possible to quickly transportthe inspection object to the predetermined position according to theinspection result.

In the inspection system according to the application example, it ispreferable that a display correction unit that corrects a display colorof an image displayed on the inspection object in a case where theinspection object displays the image by self-illumination is furtherincluded and in which the transport mechanism transports the inspectionobject to the display correction unit in a case where a defect having apredetermined size or larger is not detected by the shape inspectionunit and chromaticity detected by the color inspection unit is out of apredetermined reference range.

In the application example with this configuration, in a case where theinspection object is an object to display an image such as a displaypanel, when the color inspection unit determines that there is anabnormality in the display color, the inspection object is transportedto the display correction unit by the transport mechanism. Accordingly,it is possible to correct the color of the image on the display panel toa correct color.

An inspection method according to another application example of theinvention includes: spectroscopically separating light from apredetermined imaging range of an inspection object into light of aplurality of wavelengths and imaging spectroscopic images of each of thewavelengths; inspecting a shape of the inspection object using aspectroscopic image of a predetermined wavelength among thespectroscopic images of each of the wavelengths imaged in the imaging ofthe spectroscopic images of each of the wavelengths; and inspecting acolor of the inspection object using the spectroscopic images of each ofthe wavelengths imaged in the imaging of the spectroscopic images ofeach of the wavelengths.

In the application example, similarly to the above-described applicationexample, using the spectroscopic images imaged by imaging thespectroscopic images of each of the wavelengths, and performing theinspecting a shape of the inspection object and the inspecting a colorof the inspection object. Accordingly, there is no need to acquire theimage for performing the shape inspection and the image for performingthe color inspection at separate processes, and the number of processesrelated to the inspection can be reduced.

BRIEF DESCRIPTION OF THE DRAWINGS

The invention will be described with reference to the accompanyingdrawings, wherein like numbers reference like elements.

FIG. 1 is a view showing a schematic configuration of an inspection lineaccording to a first embodiment.

FIG. 2 is a schematic diagram showing a schematic configuration of aspectroscopic camera of the first embodiment.

FIG. 3 is a block diagram showing a functional configuration of theinspection line of the first embodiment.

FIG. 4 is a flowchart showing an inspection method in the inspectionline of the first embodiment.

FIG. 5 is a flowchart showing a process of step S3 in FIG. 4.

FIG. 6 is a flowchart showing a process of step S7 in FIG. 4.

FIG. 7 is a view showing a schematic configuration of an inspection lineof a second embodiment.

FIG. 8 is a schematic sectional view of a vicinity of a spectroscopiccamera of a vision arm of the second embodiment.

FIG. 9 is a view showing a schematic configuration of an inspection lineof a third embodiment.

FIG. 10 is a schematic sectional view of a pick-up portion of a thirdtransport arm of the third embodiment.

DESCRIPTION OF EXEMPLARY EMBODIMENTS First Embodiment

The first embodiment will be described below.

In the first embodiment, an inspection line (inspection system) providedin a portion of a manufacturing line of a display panel (inspectionobject) which is a product in a display panel manufacturing factory willbe described. In the inspection line of the present embodiment, it isinspected whether there is a defect such as a scratch on the displaypanel manufactured in a processing and assembly line of themanufacturing line and whether there is any abnormality in the displayperformance (color of displayed image) of the display panel. In theinspection line, in a case where there is a defect such as a scratch onthe display panel, the display panel is classified as a defectiveproduct, and in a case where there is no defect such as a scratch on thedisplay panel, but there is an abnormality in the color of the displayedimage, the display panel is classified as a correction target product.The display panel in which there is no defect such as a scratch and thedisplay color is normal is classified as a good product.

Hereinafter, a specific configuration of such an inspection line will bedescribed.

1. Overall Configuration of Inspection Line 1

FIG. 1 is a view showing a schematic configuration of an inspection line1 according to a first embodiment.

As shown in FIG. 1, the inspection line 1 which is an inspection systemincludes a belt conveyor 10, a first transport arm 20, a spectroscopiccamera 30, a second transport arm 40, a robot controller 50 (transportcontroller), a vision controller 60, and a correction unit 70.

In the present embodiment, a display panel P as an inspection object isassumed to be powered on, self-illuminated with a backlight turned on,and transported to the inspection line 1 in a state in which apredetermined pattern image is displayed. The pattern image may be, forexample, an image of a single color (for example, white) or a patternimage in which a display area of the display panel P is divided into aplurality of areas and different colors are displayed in each area.

Here, the spectroscopic camera 30, the second transport arm 40, therobot controller 50, and the vision controller 60 constitute theinspection apparatus according to the invention. The belt conveyor 10and the first transport arm 20 constitute a transport mechanismaccording to the invention.

1-1. Belt Conveyor 10

In the belt conveyor 10, for example, a pedestal portion 11 is disposedat a constant interval and these pedestal portions 11 are transported ina first transport direction X.

In the present embodiment, an inspect transport portion 10A, a firsttransport portion 10B (first transport position), and a second transportportion 10C (second transport position) are provided as the beltconveyor 10 provided in the inspection line 1.

The inspect transport portion 10A transports the display panel Pmanufactured by the processing and assembly line (not shown) in thefirst transport direction X.

The first transport portion 10B transports the defective display panel Pto a predetermined defect collection position.

The second transport portion 10C transports the display panel P to becolor-corrected to the correction unit (display correction unit).

In the present embodiment, an example in which the pedestal portion 11and the display panel P are transported by the belt conveyor 10 isdescribed, but is not limited thereto. A configuration in which the beltconveyor 10 is not provided and the display panel P is sequentiallytransported to the pedestal portion 11 disposed at a predeterminedinterval by a plurality of transport arms may be adopted.

In the present embodiment, a configuration in which the belt conveyorprovided in the processing and assembly line and the belt conveyor 10provided in the inspection line 1 are different is described as anexample. However, a configuration in which the display panel P istransported from the processing and assembly line to the inspection line1 by a single belt conveyor 10 may be adopted.

1-2. First Transport Arm 20

The first transport arm 20 is disposed at a predetermined position inthe first transport direction X.

As shown in FIG. 1, the first transport arm 20 is an articulated robotarm in which a plurality of arm portions 21 are rotatably connected toeach other. A pick-up portion 22 for picking up the display panel P isprovided at the tip end portion of the first transport arm 20.

The first transport arm 20 picks up the display panel P manufactured bythe processing and assembly line and transported to a predeterminedposition and places the display panel on the pedestal portion 11 on thebelt conveyor 10. As described above, in the case where the same beltconveyor 10 is used for the processing and assembly line and theinspection line, the first transport arm 20 may not be disposed.

1-3. Spectroscopic Camera 30

The spectroscopic camera 30 is a spectroscopic imaging unit according tothe invention and is disposed, for example, at a position between thefirst transport arm 20 and the second transport arm 40 facing the beltconveyor 10. That is, the spectroscopic camera 30 of the presentembodiment is fixed at a predetermined position in the first transportdirection X, and the imaging direction of the spectroscopic camera 30 isdirected to an upper surface (transport surface 12) of the belt conveyor10. Here, the spectroscopic camera 30 is disposed in a normal directionof the upper surface (transport surface 12) of the belt conveyor 10 andmay image the display panel P from the normal direction, and may imagethe display panel P from a direction inclined at a predetermined anglewith respect to the normal direction of the transport surface 12. In thepresent embodiment, since illumination light is not emitted from thespectroscopic camera 30 toward the display panel P, the illuminationlight specularly reflected on the surface of the display panel P cannotbe imaged by the spectroscopic camera 30.

FIG. 2 is a schematic diagram showing the schematic configuration of thespectroscopic camera 30 of the present embodiment.

As shown in FIG. 2, the spectroscopic camera 30 includes an incidentoptical system 31, a variable wavelength interference filter 32, animaging element 33, and a microcontroller 34. A reference object 39 forperforming calibration of the spectroscopic camera 30 is provided withinan image range that can be imaged by the spectroscopic camera 30 orwithin the imaging range in a forward and backward movable manner.

The incident optical system 31 is composed of, for example, atelecentric optical system or the like, and guides incident light to thevariable wavelength interference filter 32 and the imaging element 33 sothat an optical axis and a principal ray are parallel or substantiallyparallel. When the display panel P placed on the pedestal portion 11 istransported to a predetermined imaging position by the belt conveyor 10,the incident optical system 31 is configured so that the image lightfrom the entire area of the display panel P is imaged by the imagingelement 33. That is, the entire area of the display panel P becomes theimaging range according to the invention, and the spectroscopic image ofthe entire display panel P is imaged by the spectroscopic camera 30.

The variable wavelength interference filter 32 is a Fabry Perot etalonfilter, and includes a pair of reflection films 321 and 322 opposite toeach other and a gap changing unit 323 (for example, electrostaticactuator) capable of changing the distance between the reflection films321 and 322. In the variable wavelength interference filter 32, thewavelength (spectral wavelength) of the light through which transmitsthe reflection films 321 and 322 can be changed by controlling thevoltage applied to the gap changing unit 323.

The imaging element 33 is a device for imaging image light transmittedthrough the variable wavelength interference filter 32, and consists of,for example, an image sensor such as a charge coupled device (CCD) and acomplementary metal oxide semiconductor (CMOS). In the spectroscopiccamera 30 of the present embodiment, the light transmitted through thevariable wavelength interference filter 32 is incident on each pixel ofthe imaging element 33. For this reason, it is possible to image aspectroscopic image with a higher resolution than, for example, an RGBcamera that forms one pixel of image data with a plurality of imagingpixels.

The microcontroller 34 is an integrated circuit including a cameracontrol unit 341 including a central processing unit (CPU) core and thelike, a camera built-in memory 342, and the like. The microcontroller 34reads and executes a computer program recorded in the camera built-inmemory 342 by the camera control unit 341, and thereby functions as awavelength switching unit 343, an imaging control unit 344, a wavelengthunevenness correction unit 345, and a calibration unit 346.

In the camera built-in memory 342, a drive table in which a commandvalue to be input to the gap changing unit 323 is recorded with respectto the wavelength of the light transmitted through the variablewavelength interference filter 32 is recorded.

The wavelength switching unit 343 changes the command value to be inputto the gap changing unit 323 of the variable wavelength interferencefilter 32 based on the drive table.

The imaging control unit 344 controls the imaging element 33 to acquirea light receiving signal (spectral information) output from each imagingpixel of the imaging element 33, and thereby obtains the spectroscopicimage.

The wavelength unevenness correction unit 345 corrects wavelengthunevenness of the imaged image.

For example, a wavelength (wavelength unevenness data) of light receivedby each imaging pixel of the imaging element 33 when the size of the gapbetween the pair of reflection films 321 and 322 of the variablewavelength interference filter 32 is set to a plurality of sizes ismeasured and stored in the camera built-in memory 342 in advance. Aftersequentially switching the wavelength of the light transmitted throughthe variable wavelength interference filter 32 and imaging thespectroscopic image for each wavelength with the imaging element 33, thewavelength unevenness correction unit 345 corrects each imaged imageusing the wavelength unevenness data. For example, the wavelengthunevenness correction unit 345 calculates the spectrum for each pixeland calculates the light quantity for the predetermined wavelength fromthe calculated spectrum. Accordingly, even in a case where unevennessoccurs in the wavelength of light received by each imaging pixel in eachspectroscopic image, it is possible to obtain a highly accuratespectroscopic image in which the wavelength unevenness is corrected.

The calibration unit 346 inspects whether or not the light transmittedthrough the variable wavelength interference filter 32 is the light ofthe target of the wavelength by imaging the reference object 39 with thespectroscopic camera 30 and in a case where it is different, thecorrection process is performed.

In the present embodiment, an object of which the optical property withrespect to the target wavelength is already known is used as thereference object 39. For example, a wavelength absorption plate of whichthe light absorption rate with respect to a plurality of spectralwavelengths to be imaged by the spectroscopic camera 30 is already knownor a reflection plate which has the peak value of the reflection ratewith respect to the spectral wavelength is used.

Accordingly, the calibration unit 346 can determine whether or not thelight of each spectral wavelength is normally transmitted through thevariable wavelength interference filter 32 based on the drive table whenthe gap changing unit 323 is controlled. The drive table is corrected byadjusting the command value to be input to the gap changing unit 323 andsearching the command value corresponding to the peak absorptionwavelength (peak reflection wavelength) of the reference object 39.

The reference object 39 may be set at a position within the imagingrange of the spectroscopic camera 30. For example, the reference object39 may be provided so as to freely advance and retract in the imagingrange of the spectroscopic camera 30 and advanced into the imaging rangewhen performing the calibration of the spectroscopic camera 30. As shownin FIG. 2, the reference object 39 may be provided at a portion of thepedestal portion 11. Alternatively, the reference object 39 may beprovided at a portion (for example, a portion of pick-up portion 42) ofthe second transport arm 40.

1-4. Second Transport Arm 40

The second transport arm 40 is provided on a downstream side of aposition where the spectroscopic camera 30 is disposed in the firsttransport direction X.

The second transport arm 40 is an articulated robot arm similar to thefirst transport arm 20 which includes a plurality of arm portions 41rotatably connected to each other and a pick-up portion 42.

The second transport arm 40 transports the display panel P to apredetermined transport line based on the control of the robotcontroller 50. In the present embodiment, in a case where there is adefect such as a scratch on the display panel P, the second transportarm 40 transports the display panel P to the first transport portion 10B(first transport position). In a case where there is an abnormality inthe display color of the display panel P, the second transport arm 40transports the display panel P to the second transport portion 10C(second transport position). On the other hand, in a case where there isno defect on the shape of the display panel P and no abnormality in thedisplay color, the display panel P is not picked up by the secondtransport arm 40 and is transported to a line for performing nextprocess (for example, rapping process) as it is along the inspecttransport portion 10A (third transport position).

1-5. Robot Controller 50

FIG. 3 is a block diagram showing a functional configuration of theinspection line 1 of the present embodiment.

The robot controller 50 is connected to each drive system of a coresystem 100 for managing the manufacture of a product, the firsttransport arm 20, the second transport arm 40, and the belt conveyor 10(inspect transport portion 10A, first transport portion 10B, and secondtransport portion 10C).

The robot controller 50 includes a robot control calculation unit 51configured by CPU and a first memory 52. When the computer programstored in the first memory 52 is read and executed, the robot controlcalculation unit 51 functions as a first transport control unit 511, aninspection command unit 512, a second transport control unit 513, and adisplay control unit 514.

The robot controller 50 starts the inspection of the display panel P asa command signal to start the inspection of the display panel P is inputfrom the core system 100.

When the inspection of the display panel P is started, the firsttransport control unit 511 controls the belt conveyor 10 and the firsttransport arm 20 to pick up the transported display panel P from theprocessing and assembly line and places the display panel P on thepedestal portion 11.

The inspection command unit 512 commands the vision controller 60 tostart the inspection on the display panel P and receives an input signal(inspection result information) from the vision controller 60. Theinspection result information includes a shape inspection resultindicating the presence or absence of a defect on the display panel Pand a color inspection result indicating the presence or absence ofabnormality in the display color. The inspection command unit 512receives a spectroscopic image with respect to each wavelength imagedwith the spectroscopic camera 30 or a display image as an input signalin addition to the inspection result information. The inspection commandunit 512 transmits the received inspection result information to thecore system 100. Accordingly, the inspection result is recorded as logdata in a data storage device (not shown) connected to the core system100.

The second transport control unit 513 controls the second transport arm40 and the belt conveyor 10 based on the inspection result received fromthe vision controller 60. That is, in a case where an inspection resultindicating that there is a defect in the shape of the display panel P isinput from the vision controller 60, the second transport control unit513 controls the second transport arm 40 and transports the displaypanel P to the first transport portion 10B. In a case where aninspection result indicating that there is an abnormality in the displaycolor of the display panel P is input from the vision controller 60, thesecond transport control unit 513 controls the second transport arm 40and transports the display panel P to the second transport portion 10C.On the other hand, in a case where an inspection result indicating thatthe display color of the display panel P is normal is input from thevision controller 60, the second transport control unit 513 transportsthe display panel P placed on the pedestal portion 11 as it is along theinspect transport portion 10A.

The display control unit 514 displays an image (such as spectroscopicimage and display image) transmitted from the vision controller 60 on adisplay (not shown).

Accordingly, it is possible to check whether or not the inspection isnormally performed by a manager managing the inspection line 1 visuallychecking the display.

1-6. Vision Controller 60

The vision controller 60 is connected to the spectroscopic camera 30 andthe robot controller 50 to perform the inspection of the display panel Pbased on the inspection command from the robot controller 50. The visioncontroller 60 may be connected to the core system 100, and in such acase, the inspection result from the vision controller 60 may betransmitted to the core system 100 and recorded as log data.

As shown in FIG. 3, the vision controller 60 includes an inspectioncontrol calculation unit 61 configured by CPU and the like and a secondmemory 62. When the computer program stored in the second memory 62 isread and executed, the inspection control calculation unit 61 functionsas a spectroscopic control unit 611, a shape inspection unit 612, and acolor inspection unit 613.

The spectroscopic control unit 611 controls the spectroscopic camera 30to image the spectroscopic images of a plurality of wavelength withrespect to the display panel P.

The shape inspection unit 612 inspects the shape of the surface of thedisplay panel P based on the spectroscopic image obtained from thespectroscopic camera 30. Specifically, the shape inspection unit 612inspects whether or not there is a defect caused by the unevenness suchas a scratch on the surface of the display panel P. The shape inspectionunit 612 may further inspect whether or not there is any adhesion of aforeign substance in addition to the inspection of the defect.

In the shape inspection executed by the shape inspection unit 612, theinspection is performed based on the spectroscopic image of thepredetermined wavelength among the spectroscopic images of the pluralityof wavelengths imaged by the spectroscopic camera 30. It is preferableto use a spectroscopic image having the shortest wavelength as thespectroscopic image to be used. That is, in a case where there isunevenness on the display panel P, the light is scattered due to theunevenness and the luminance value at the edge portion of the unevennessis higher than the other portions when the display panel P emits light.At this time, the scattered light becomes stronger at shorterwavelength, it is possible to detect the unevenness where the light isscattered with high accuracy by using the spectroscopic image of shortwavelength.

The detection method of a shape defect by the shape inspection unit 612is not particularly limited. For example, the shape inspection unit 612calculates the luminance value between adjacent pixels along ahorizontal direction and a vertical direction of the spectroscopic imageand performs edge detection for detecting the portion in which thevariation value of luminance value is equal to or higher than apredetermined value as the edge portion. In addition, any method such asedge detection using Canny method, edge detection using secondarydifferentiation (Laplacian filter), and the like may be used.

The color inspection unit 613 performs color inspection on the displaypanel P based on the plurality of spectroscopic images transmitted fromthe spectroscopic camera 30. That is, the color inspection unit 613determines whether or not the chromaticity of the display panel P is outof the reference range.

Specifically, the color inspection unit 613 compares the color of eachpixel of the pattern image displayed on the display panel P with thecolor (reference color information) of each pixel on the original imagedata of the pattern image, and determines whether or not the colordisplayed on the display panel P is normal or the color unevennessoccurs. In this, the color inspection unit 613 converts the signal value(spectral information) of each pixel of each spectroscopic image tocolor information of a predetermined color system (such as L*a*b*colorsystem) and generates a conversion image. The conversion image becomes adisplay image to be displayed on the display by the display control unit514. The color inspection unit 613 calculates the difference (colordifference ΔE) between the calculated color information and thereference color information with respect to each pixel and determineswhether or not the color difference ΔE is within an allowable value.

1-7. Correction Unit 70

The correction unit 70 is provided at a transport destination on thesecond transport portion 10C. The correction unit 70 performs colorcorrection of the display panel P transported to the second transportportion 10C, that is, the display panel P determined to have anabnormality in the display color by the color inspection unit 613.

Specifically, the correction unit 70 is composed of a computer and has aconnecting portion connectable to the transported display panel P. Thedisplay panel P transported along the second transport portion 10C isconnected to the connecting portion by a robot arm (not shown) and iscommunicable with the correction unit 70. The correction unit 70corrects a display profile of each pixel of the display panel P based onthe color difference ΔE calculated from the inspection by the colorinspection unit 613.

2. Inspection Method of Display Panel P in Inspection Line 1

Next, the inspection method of the display panel P in theabove-described inspection line 1 will be described.

FIG. 4 is a flowchart showing an inspection method in the inspectionline 1.

In the inspection line 1 of the present embodiment, the robot controller50 receives a command signal indicating the start of the inspection ofthe display panel P from the core system 100 (step S1).

Accordingly, the robot controller 50 commands the vision controller 60to perform the calibration process of the spectroscopic camera 30 (stepS2). At this time, the robot controller 50 moves the reference object 39into the imaging range of the spectroscopic camera 30. For example, in acase where the reference object 39 is provided at a portion of thepedestal portion 11, the robot controller 50 drives the belt conveyor 10to move the pedestal portion 11 into the imaging range of thespectroscopic camera 30.

When the calibration of the spectroscopic camera is commanded, thevision controller 60 controls the spectroscopic camera 30 to perform thecalibration process (step S3).

FIG. 5 is a flowchart showing the calibration process in step S3.

In the calibration process of the spectroscopic camera 30, thewavelength switching unit 343 first initializes (i=1) a variable i (stepS31). Here, the variable i is a variable related to the wavelength whichtransmits through the variable wavelength interference filter 32, andthe target wavelength from i=1 to i=I and the command valuecorresponding to the target wavelength are recorded in the drive table.

The wavelength switching unit 343 reads the command value correspondingto the variable i from the drive table and inputs the command value tothe gap changing unit 323 of the variable wavelength interference filter32 (step S32). Furthermore, the imaging control unit 344 controls theimaging element 33 to image the image light transmitted through thevariable wavelength interference filter 32 (step S33).

Next, the calibration unit 346 determines whether or not the lightquantity of each imaging pixel received with the imaging element 33 iswithin the reference range (step S34). For example, in a case where thereference object 39 is a wavelength absorption plate and the lightabsorption rate thereof with respect to the target wavelength is higherthan other wavelengths, the calibration unit 346 determines whether ornot the light quantity for each imaging pixel is equal to or lower thana predetermined first threshold. Alternatively, in a case where thereference object 39 having the reflection rate with respect to thetarget wavelength higher than the other wavelengths is used, thecalibration unit 346 determines whether or not the light quantity ofeach imaging pixel is equal to or higher than a predetermined secondthreshold.

In a case where the determination result in step S34 is Yes, thecalibration unit 346 determines that the variable wavelengthinterference filter 32 is normally driven (step S35).

In a case where the determination result in step S34 is No, thewavelength switching unit 343 adjusts the command value to be input tothe gap changing unit 323 to be set within a predetermined range, andsearches the command value in which the light quantity of each pixel iswithin the reference range (step S36). The searched command value isrecorded in the drive table, and corrected and updated (step S37).

After steps S35 and S37, the wavelength switching unit 343 adds 1 to thevariable i (step S38) and determines whether or not the variable i isthe maximum value I (step S39). In the case where the determinationresult in step S39 is No, the process returns to step S32. That is, in acase where it is determined that the variable wavelength interferencefilter 32 is normally driven and the wavelength deviates with respect toeach target wavelength recorded in the drive table, the drive table iscorrected so that the light of the target wavelength is transmittedthrough.

When the determination result in step S39 is Yes, the calibrationprocess of the spectroscopic camera 30 ends and replies the completionof calibration to the robot controller 50 (step S4).

Next, the first transport control unit 511 of the robot controller 50drives the belt conveyor 10 and controls the first transport arm 20 topick up the display panel P and place the display panel P on thepedestal portion 11 (step S5). The transport operation of the displaypanel P is sequentially performed, and a plurality of the display panelsP are sequentially sent to the spectroscopic camera 30 side.

When the pedestal portion 11 is moved to the imaging range of theimaging element 33, the robot controller 50 commands the visioncontroller 60 to perform the inspection of the display panel P (stepS6).

When the inspection of the display panel P is commanded, thespectroscopic control unit 611 of the vision controller 60 controls thespectroscopic camera 30 and images the spectroscopic image (step S7;spectroscopic image step).

FIG. 6 is a flowchart showing the imaging process of the spectroscopicimage in step S7.

In the imaging process of the spectroscopic image, the wavelengthswitching unit 343 first initializes (i=1) the variable i (step S71).

The wavelength switching unit 343 reads the command value correspondingto the variable i from the drive table and inputs the command value tothe gap changing unit 323 of the variable wavelength interference filter32 (step S72). Furthermore, the imaging control unit 344 controls theimaging element 33 to image the image light transmitted through thevariable wavelength interference filter 32 (step S73).

Next, the wavelength switching unit 343 adds 1 to the variable i (stepS74) and determines whether or not the variable i is the maximum value I(step S75). In the case where the determination result in step S75 isNo, the process returns to step S72. That is, the spectroscopic imagewith respect to the plurality of wavelengths (target wavelength) set inadvance is imaged.

When the determination result in step S75 is Yes, the wavelengthunevenness correction unit 345 corrects the signal value of each pixelof each spectroscopic image to the signal value corresponding to thetarget wavelength of the spectroscopic image. That is, the wavelengthunevenness of each spectroscopic image is corrected (step S76).

The microcontroller 34 of the spectroscopic camera 30 transmits thespectroscopic image with respect to each target wavelength obtained asdescribed above to the vision controller 60 (step S77).

In the vision controller 60, when the spectroscopic control unit 611acquires the spectroscopic image with respect to each target wavelengthfrom the spectroscopic camera 30, each spectroscopic image is stored inthe second memory 62.

Next, the shape inspection unit 612 reads the spectroscopic image to beused in the shape inspection from the second memory 62 among theplurality of spectroscopic images (step S8). In the present embodiment,the spectroscopic image having the shortest wavelength is used in shapeinspection.

The shape inspection unit 612 performs an edge detection process basedon the read spectroscopic image and determines whether or not there is adefect having a size equal to or larger than a predetermined size (thirdthreshold) (step S9; shape inspection step). As an edge detectionprocess, as described above, the edge may be detected based on thedifference in luminance value between adjacent pixels, or the edge maybe detected by the application of the Laplacian filter or by the use ofthe Canny method.

In the case where the determination result in step S9 is Yes, that is,in the case where a defect is found in the display panel P, theinspection result information indicating that there is a shape defect ofthe display panel P is generated (step S10).

In the case where the determination result in step S9 is No, that is, inthe case where the shape inspection unit 612 determines that the displaypanel P has no defect, the color inspection unit 613 reads thespectroscopic image corresponding to each target wavelength from thesecond memory 62 and generates the display image (step S11).

In the generation of the display image, as described above, the colorinspection unit 613 generates an image which expresses each pixel withcolor information of the predetermined color system (L*a*b*color system)using the signal value (spectral information) of each pixel of eachspectroscopic image.

Thereafter, the color inspection unit 613 performs a color inspectionprocess based on the color information of each pixel calculated at theimage generation in step S10 and determines whether or not there is acolor abnormality (step S12; color inspection step).

In the color inspection process, the color inspection unit 613calculates an average value of the color information of each pixel anddetermines whether or not the average value is within the predeterminedfirst allowable range. That is, the color inspection unit 613 determineswhether or not the individual difference of the individual display panelP is within the allowable value. Here, in a case where the average valueon the color information is out of the first allowable range, the colorinspection unit 613 determines that there is an abnormality in colorreproducibility of the display panel P (first color abnormality).

In the color inspection, the color inspection unit 613 furthercalculates the color difference ΔE between the color information of eachpixel and the reference color information of the pattern image displayedon the display panel P, and determines whether or not the colordifference ΔE is within a predetermined second allowable range. That is,the presence or absence of the color unevenness in the display panel Pis determined. Here, in a case where the color difference is out of thesecond allowable range, the color inspection unit 613 determines thatthere is color unevenness in the display panel P (second colorabnormality).

In the case where the color inspection unit 613 determines that there isat least one of the first color abnormality and the second colorabnormality (in the case where the determination result in step S12 isYes), the color inspection unit 613 generates the inspection resultinformation indicating that there is the color abnormality (step S13).The inspection result information includes the type of color abnormality(either one of or both first color abnormality and second colorabnormality) and the degree of the color abnormality (such as averagevalue of color information and color difference ΔE of each pixel).

In step S12, in a case where the determination result is No (in a casewhere there is no color abnormality), the inspection result informationincluding information indicating that the display panel P is normal(good product), each spectroscopic image, and the display image isgenerated (step S14).

Thereafter, the vision controller 60 transmits the generated inspectionresult information, each spectroscopic image imaged in step S7, and thedisplay image to the robot controller 50 (step S15).

When the robot controller 50 receives the inspection result information,the spectroscopic image, and the display image from the visioncontroller 60, the display control unit 514 displays the receivedspectroscopic image and the display image on a predetermined display.The robot controller 50 transmits the acquired inspection resultinformation to the core system 100. Accordingly, the core system 100stores the transmitted inspection result information in a predetermineddata storage device as the inspection log.

The second transport control unit 513 of the robot controller 50controls the operation of the second transport arm 40 based on thereceived inspection result information.

To this, the second transport control unit 513 first determines whetheror not the inspection result information including the shape inspectionresult on the shape defective product is received (step S16).

In the case where the determination result in step S16 is Yes, thesecond transport control unit 513 picks up the display panel P by thesecond transport arm 40, and transports the display panel P to the firsttransport portion 10B (step S17). In step S9, when the inspection resultinformation indicating a shape defective product is generated, theprocess from step S11 to step S14 is omitted and the inspection resultinformation is transmitted in step S15. Accordingly, in the case wherethe display panel P has a shape defect and is determined to be adefective product, the display panel P is immediately transported fromthe first transport portion 10B to the collection position for thedefective product.

In the case where the determination result is No in step S16, the secondtransport control unit 513 determines whether or not at least one of thefirst color abnormality and the second color abnormality of the colorinspection result is included in the inspection result information (stepS18).

In the case where the determination result in step S18 is Yes, thesecond transport control unit 513 picks up the display panel P with thesecond transport arm 40 and transports the display panel P to the secondtransport portion 10C (step S19). Accordingly, the display panel Pdetermined to have the color abnormality is transported from the secondtransport portion 10C to the correction unit 70.

At this time, the robot controller 50 transmits the inspection resultinformation to the correction unit 70. Accordingly, the correction unit70 can correct the display color of the display panel P according to thetype of the color abnormality.

In the case where the determination result is No in step S18, that is,in the case where no shape defect nor color abnormality is detected, thesecond transport control unit 513 transports the display panel P as itis along the inspect transport portion 10A (step S20). Accordingly, thedisplay panel P which is a good product is transported to the nextprocess line (for example, rapping process).

Operation and Effect of Present Embodiment

In the inspection line 1 of the present embodiment, the display panel Pis imaged as the inspection object, and the light from the predeterminedimaging range of the display panel P is spectroscopically separated intoa plurality of wavelengths and the spectroscopic images of each of thewavelengths are imaged by the spectroscopic camera 30. The shapeinspection unit 612 of the vision controller 60 performs the shapeinspection process for inspecting the shape of the display panel P usingthe spectroscopic image of a predetermined wavelength from these imagedspectroscopic images. The color inspection unit 613 of the visioncontroller 60 performs the color inspection process for inspecting thedisplay color of the display panel P using a plurality of spectroscopicimages imaged with the spectroscopic camera 30.

In the present embodiment, since the spectroscopic image of theself-illuminated display panel P as an inspection object is imaged, in acase where there is a shape defect on the surface of the inspectionobject, the luminance value of the spectroscopic image changes due tothe scattering of light. Therefore, the shape inspection unit 612 doesnot need to emit illumination light having a specific pattern such as afringe pattern, and can easily perform the shape inspection using anyspectroscopic image imaged as the color inspection. In the colorinspection, since the spectrum of each pixel is obtained from thespectroscopic image of the plurality of wavelengths, it is possible todetect the color abnormality for each pixel with high accuracy.

That is, in the present embodiment, it is possible to perform both theshape inspection by the shape inspection unit 612 and the colorinspection by the color inspection unit 613 based on the measurementresult obtained by a single spectroscopic camera 30. Therefore, it isnot necessary to acquire an image for performing the shape inspectionand an image for performing the color inspection in separate processes,and thereby, it is possible to reduce the number of processes related tothe inspection.

In the inspection line 1 of the present embodiment, the spectroscopiccamera 30 includes the variable wavelength interference filter 32 andthe imaging element 33 for imaging an image of the light transmittedthrough the variable wavelength interference filter.

A spectroscopic filter such as AOTF or LCTF can be used as aspectroscopic filter used in the spectroscopic camera 30. However, inthis case, the spectroscopic camera increases in size, and it isnecessary to secure a disposition space in the inspection line 1. On theother hand, in the present embodiment, the spectroscopic camera 30 whichspectroscopically separates the incident light by the variablewavelength interference filter 32. Such a variable wavelengthinterference filter 32 is superior in thickness reduction,miniaturization, and weight saving compared to the AOTF or the LCTF, sothat it is possible to reduce the size and weight of the spectroscopiccamera 30. Accordingly, it is possible to improve the freedom degree ofthe disposition space of the spectroscopic camera 30, and it is possibleto dispose the spectroscopic camera 30 at any position in amanufacturing factory and the like.

In the present embodiment, the first transport arm and the secondtransport arm 40 for transporting the display panel P are provided, andthe driving of the first transport arm 20 and the second transport arm40 is controlled by the robot controller 50. The vision controller 60which controls the spectroscopic camera 30 is provided.

That is, in the present embodiment, a control mechanism (robotcontroller 50) for controlling the robot such as the first transport arm20 and the second transport arm 40 and a control mechanism (visioncontroller 60) for controlling the spectroscopic camera 30 to performthe inspection are configured separately. Accordingly, the versatilityof the inspection apparatus can be enhanced. For example, the visioncontroller 60 can also be applied to the inspection lines of differenttypes of the display panels P and can also be applied to various othermanufacturing lines other than the display panel P.

In the present embodiment, in the case where the display panel P has ashape defect, the robot controller 50 transports the display panel P tothe first transport portion 10B which transports the display panel P tothe collection position of the defective product based on the inspectionresult information input from the vision controller 60. In the casewhere the display panel P has the color abnormality, the robotcontroller 50 transports the display panel P to the second transportportion 10C which transports the display panel P to the correction unit70 which performs the color correction. In a case where the displaypanel P is normal (good product), the robot controller 50 transports thedisplay panel P to the next process line by the inspect transportportion 10A (third transport portion).

Accordingly, the robot controller 50 can quickly transport the displaypanel P to an appropriate position and sort out the display panel Pefficiently according to the inspection result information.

The color correction is performed on the display panel P transported bythe second transport portion 10C by the correction unit 70, and theimage of the display panel P can be corrected to a correct color.Therefore, the correctable display panel P is not collected as adefective product, and thereby the yield can be improved.

In the inspection line 1 of the present embodiment, the reference object39 which performs the calibration of the spectroscopic camera 30 isprovided. Accordingly, it is possible to examine whether or not thespectroscopic camera 30 is appropriately driven before the inspection ofthe display panel P.

In the present embodiment, the shape inspection unit 612 performs theshape inspection using the spectroscopic image having the shortestwavelength among the plurality of spectroscopic images.

By using such a spectroscopic image, since an intensive scattered lightis generated in the case where unevenness such as a scratch is on thesurface of the display panel P, it is possible to detect the unevennesswith high accuracy and to enhance the accuracy of the shape inspection.

Second Embodiment

Next, a second embodiment will be described.

In the first embodiment, an example in which the spectroscopic camera 30is fixed at a predetermined position capable of imaging an image of thedisplay panel P transported by the belt conveyor 10 is described. On theother hand, in the second embodiment, it is different from the firstembodiment in that the spectroscopic camera 30 is fixed to a robot arm.

In the following description, the same reference numerals are attachedto the items already described, and the description thereof is omittedor simplified.

FIG. 7 is a view showing a schematic configuration of an inspection line1A of the second embodiment.

As shown in FIG. 7, the inspection line 1A of the second embodimentincludes the belt conveyor 10, the first transport arm 20, thespectroscopic camera 30, the second transport arm 40, the robotcontroller 50, and the vision controller 60 as in the first embodiment.The inspection line 1A of the present embodiment is further providedwith a vision arm 80 to which the spectroscopic camera 30 is fixed.

The vision arm 80 (imaging holding arm) is, for example, an articulatedrobot arm in which a plurality of arm portions 81 are rotatablyconnected to each other similarly to the first transport arm 20 and thesecond transport arm 40, and the spectroscopic camera 30 is fixed to acamera holding portion 83 (imaging holding portion) provided at the tipend portion of the arm portions 81. Accordingly, in the presentembodiment, the driving of the vision arm 80 is controlled by the robotcontroller 50 so that the spectroscopic camera 30 is relatively movablewith respect to the display panel P.

FIG. 8 is a schematic sectional view of a holding position of thespectroscopic camera 30 on the vision arm 80. In the present embodiment,the spectroscopic camera 30 is fixed to the camera holding portion 83provided at the tip end of the vision arm 80 via a buffer material 84.As a buffer material 84, for example, an elastic member such as rubbercan be used.

In such a configuration, it is possible to suppress the vibrationgenerated when the vision arm 80 is driven from being transmitted to thespectroscopic camera 30. Accordingly, the inconvenience of the gapbetween the pair of reflection films 321 and 322 at the variablewavelength interference filter 32 fluctuating due to the vibration issuppressed, and it is possible to image a spectroscopic image with highaccuracy.

In the present embodiment, when imaging a spectroscopic image of thedisplay panel P, the robot controller 50 controls the driving of thevision arm 80 and moves the position of the spectroscopic camera 30 sothat the display panel P is placed within the imaging range.

In the second embodiment, the configuration is the same as that of thefirst embodiment except that the spectroscopic camera 30 is provided atthe vision arm 80, and it is possible to inspect the display panel P bythe same inspection method as the first embodiment.

Operation and Effect of Present Embodiment

In the present embodiment, the vision arm 80 is provided at theinspection line 1, and the spectroscopic camera 30 is held by the visionarm 80.

Therefore, it is possible to move the spectroscopic camera 30 withrespect to the display panel P, and it is possible to image an image ofthe display panel P from any directions. For example, not only an imagedisplay region of the display panel P but also the side surface of thedisplay panel P can be imaged with the spectroscopic camera 30 and it ispossible to inspect an abnormality such as a defect in a region otherthan the image display region of the display panel P.

The spectroscopic camera 30 is fixed to the camera holding portion 83 ofthe vision arm 80 via the buffer material 84. Therefore, thetransmission of the vibration from the vision arm 80 is suppressed bythe buffer material 84, the blur of the image imaged by thespectroscopic camera 30, the wavelength shifting due to the gapfluctuation of the variable wavelength interference filter 32, and thelike can be suppressed, and thereby a spectroscopic image with highaccuracy can be obtained.

Third Embodiment

Next, a third embodiment will be described.

In the first embodiment and the second embodiment, the spectroscopiccamera 30 and the second transport arm 40 are separate portions, andafter a spectroscopic image is imaged by the spectroscopic camera 30,the display panel P is transported to the predetermined position by thesecond transport arm 40. On the other hand, the third embodiment isdifferent from the above-described embodiments in that the spectroscopiccamera 30 is held by a transport arm which transports the display panelP.

FIG. 9 is a view showing a schematic configuration of an inspection line1B of the third embodiment. FIG. 10 is a sectional view showing aschematic configuration of a pick-up portion 92 of a third transport arm90.

As shown in FIG. 9, in the inspection line 1B of the present embodiment,the third transport arm 90 is provided instead of the spectroscopiccamera 30 (fixed type) of the first embodiment and the second transportarm 40.

The third transport arm 90 is an articulated robot arm in which aplurality of arm portions 91 are rotatably connected to each othersimilarly to the first transport arm 20 and the second transport arm 40,and the pick-up portion 92 which picks up the display panel P isprovided at the tip end portion of the arm portions 91.

The pick-up portion 92 includes, for example, a base 93 and a grippingportion 94 on which the base 93 is provided as shown in FIG. 10.

The gripping portion 94 is provided as a pair in a forward and backwardmovable manner in a direction approaching and separating from eachother, holds and transports the display panel P by the control of therobot controller 50.

On the base 93, when the display panel P is gripped between the pair ofgripping portions 94, that is, by the gripping portion 94, a recessedportion 95 (imaging holding portion) is provided at a position opposedto the display panel P. The spectroscopic camera 30 is held in therecessed portion 95 via a buffer material 96. As a buffer material 96,similar to the second embodiment, an elastic member such as rubber canbe used.

In the present embodiment, when the display panel P is gripped by thethird transport arm 90, the spectroscopic image of the plurality oftarget wavelengths with respect to the display panel P is imaged by thespectroscopic camera 30. Based on the spectroscopic image, the processesin steps S8 to S15 of the first embodiment are performed to perform theshape inspection and the color inspection of the display panel P. Basedon the inspection result information, the robot controller 50 drives thethird transport arm 90 and transports the display panel P to any one ofthe inspect transport portion 10A, the first transport portion 10B, andthe second transport portion 10C.

Operation and Effect of Present Embodiment

In the present embodiment, the third transport arm 90 which transports(sorts out) the display panel P to any one of the inspect transportportion 10A, the first transport portion 10B, and the second transportportion 10C is provided. The third transport arm 90 includes thegripping portion 94 which grips the display panel P and the recessedportion 95 positioned opposite to the display panel P gripped by thegripping portion 94, and the spectroscopic camera 30 is held in therecessed portion 95.

In such a configuration, it is possible to perform the imaging processof the spectroscopic image by the spectroscopic camera 30 and the shapeinspection and the color inspection based on the imaged spectroscopicimage in the middle of transporting the display panel P by the thirdtransport arm 90. Therefore, as in the first embodiment and the secondembodiment, after imaging the spectroscopic image by the spectroscopiccamera 30 and performing the inspection process, the display panel P canbe more quickly sorted out to the predetermined position compared to thecase where the display panel P is picked up and transported by thesecond transport arm 40.

The spectroscopic camera 30 is held in the recessed portion 95 via thebuffer material 96. Therefore, in the middle of transporting the displaypanel P by the third transport arm 90, even in the case where thespectroscopic image is imaged by the spectroscopic camera 30, thevibration from the third transport arm 90 is hardly transmitted to thespectroscopic camera 30. Therefore, it is possible to suppress thedegradation of the spectral accuracy in the spectroscopic camera 30.

Fourth Embodiment

Next, a fourth embodiment will be described.

In the first embodiment, the shape inspection unit 612 performs theshape inspection based on the spectroscopic image having the shortestwavelength among the plurality of spectroscopic images. On the otherhand, the spectroscopic image when performing the shape inspection inthe third embodiment is different from the first embodiment.

That is, the shape inspection unit 612 of the present embodimentperforms the shape inspection process based on the spectroscopic imagehaving a wavelength at which the light emission amount is maximum (peak)when the display panel P is self-illuminated. In the display panel P,the wavelength at which the light emission amount is maximum isdetermined by the type of the backlight and the like. Accordingly, itmay be stored in the second memory of the vision controller 60 inadvance. The shape inspection unit 612 may select a spectroscopic imagehaving the maximum average luminance or select a spectroscopic imagehaving the maximum luminance value by comparing the maximum luminancevalue of each the spectroscopic images among the plurality of imagedspectroscopic images.

The shape inspection process method and other inspection process and thetransport of the display panel P are the same as the first embodiment.

Operation and Effect of Present Embodiment

In the present embodiment, the shape inspection unit 612 performs theshape inspection based on the spectroscopic image corresponding to thewavelength having the maximum light emission amount on the display panelP. In such a peak wavelength, the light quantity of the light receivedby the spectroscopic camera 30 increases, so that in the case where thescattering of light occurs, the light quantity of the scattered lightalso increases. Therefore, the shape inspection unit 612 can detect theunevenness on the surface of the display panel P with high accuracy.

MODIFICATION EXAMPLES

The invention is not limited to the above-described embodiments, andvariations, improvements, and the like within the scope of attaining theobject of the invention are included in the invention.

Modification Example 1

In the first to fourth embodiments, an example that the shape inspectionunit 612 detects the unevenness such as a scratch based on aspectroscopic image is described, but the invention is not limitedthereto. The shape inspection unit 612 may further detect a foreignsubstance attached to the display panel P. For example, the shapeinspection unit 612 may extract spectroscopic images within a wavelengthrange from near-infrared light to infrared light among the plurality ofspectroscopic images imaged by the spectroscopic camera 30 and specifythe component and the type of the foreign substance by measuring theabsorption spectrum of the foreign substance.

In this case, the shape inspection unit 612 can determine whether theshape abnormality of the display panel P is caused by a defect such as ascratch or adhesion of a foreign substance. The robot controller 50 cantransport the display panel P to separate lines (belt conveyor) in thecase where the display panel P has a defect and in the case where aforeign substance is attached on the display panel P according to theshape inspection result. For example, in the case where the displaypanel P has a scratch, similar to the above-described embodiment, thedisplay panel P is transported to the first transport portion 10B whichtransports the display panel P to the defect collection position. In thecase where a foreign substance is attached on the display panel P, therobot controller 50 controls the second transport arm 40 to transportthe display panel P on a belt conveyor heading to a washing device forwashing the display panel P.

Modification Example 2

In the third embodiment, a second camera capable of imaging an imageother than the surface of the display panel P may further be included inaddition to the third transport arm 90. As a second camera, for example,a fixed type spectroscopic camera like the first embodiment and aspectroscopic camera held by a vision arm like the second embodiment canbe exemplified. As a second camera, an RGB camera may be used and alight source which irradiates the image target with the illuminationlight may be provided.

In this case, when the display panel P is transported by the thirdtransport arm 90, the fixed spectroscopic camera or the spectroscopiccamera held in the vision arm can image a spectroscopic image of therear surface of the display panel P or the shape inspection of the outercase of the display panel P and the like can be simultaneouslyperformed.

Modification Example 3

In the first to fourth embodiments, an example in which the variablewavelength interference filter 32 is installed in the spectroscopiccamera 30 is described, but the invention is not limited thereto. TheAOTF, the LCTF, and the like can be used as a spectroscopic elementwhich spectroscopically separates the light from the display panel P inaddition to the above-described variable wavelength interference filter32.

Modification Example 4

In the second embodiment, an example in which the spectroscopic camera30 is held by the vision arm 80 is described, but it is not limited tosuch a robot arm. For example, a slide member movable along the firsttransport direction X may be provided to hold the spectroscopic camera30 by the slide member.

Modification Example 5

An example in which the display panel P is gripped by the pair ofgripping portions 94, the recessed portion which holds the spectroscopiccamera 30 is provided between these gripping portions 94, and thedisplay panel P is imaged from the normal direction in the thirdtransport arm 90 is described, but it is not limited thereto.

For example, the pick-up portion 92 may absorb and pick up the displaypanel P. The spectroscopic camera 30 may be held at an angle in whichthe imaging direction is inclined with respect to the normal line of thedisplay panel P.

Other Modification Example

In the above-described embodiments, an example in which the robotcontroller 50 and the vision controller 60 are separately provided isdescribed, but, for example, it may be integrated.

In the above-described embodiments, an example in which the displaypanel P is used as a target object is described, but it is not limitedthereto. For example, the target object may be a light-transmittingmember such as a film, and a light source may be provided on thepedestal portion 11. In this case, the light from the light source istransmitted through the target object and imaged by the spectroscopiccamera 30. In the configuration, there is no need to provide anillumination light source such as a fringe pattern in the spectroscopiccamera 30. In a case where there is a shape defect such as a scratch inthe target object when the light of the light source provided on thepedestal portion 11 is transmitted through the target object, the lightis scattered at the defect. Therefore, similar to the above-describedembodiments, a spectroscopic image can be used to preferably inspect theshape abnormality of the target object. The color inspection of thetarget object can be performed based on the spectroscopic image of theplurality of wavelengths.

In the above-described embodiments, an example in which the displaypanel P is transported to the next process line as it is by the inspecttransport portion 10A along the first transport direction X in a casewhere the display panel P is a good product. However, the display panelP may be transported on a belt conveyor (third transport portion)different from the inspect transport portion 10A and transported to thenext process line.

An example in which the microcontroller 34 of the spectroscopic camera30 functions as the wavelength unevenness correction unit 345 isdescribed, but the function may not be installed. For example, thewavelength unevenness data is stored in the second memory 62, and thevision controller 60 may perform the correction of the wavelengthunevenness in the plurality of spectroscopic images received from thespectroscopic camera 30.

In the first embodiment, an example in which processes in steps from S11to S14 are omitted in a case where the determination result in step S9is Yes (display panel P is determined to have shape defect) isdescribed. On the other hand, even in the case where the determinationresult in step S9 is Yes, the processes in steps from S11 to S14 may beperformed. Alternatively, even in the case where the determinationresult in step S9 is Yes, the display image generation process of stepS11 may be performed and the processes in steps from S12 to S14 may beomitted.

The specific structure at the time of practicing the invention can beappropriately changed to other structures or the like within a rangethat can achieve the object of the invention.

The entire disclosure of Japanese Patent Application No. 2018-037543filed on Mar. 2, 2018 is expressly incorporated by reference herein.

What is claimed is:
 1. An inspection apparatus comprising: aspectroscopic imager that spectroscopically separates light from apredetermined imaging range of an inspection object into light of aplurality of wavelengths and images spectroscopic images of each of thewavelengths; a shape inspection unit that inspects a shape of theinspection object using a spectroscopic image of a predeterminedwavelength among the spectroscopic images of each of the wavelengths;and a color inspection unit that inspects a color of the inspectionobject using the spectroscopic images of each of the wavelengths.
 2. Theinspection apparatus according to claim 1, wherein the spectroscopicimager includes a variable wavelength interference filter that includesa pair of reflection films opposite to each other and a gap changingunit which changes a gap size between the pair of reflection films, andan imaging element that images light transmitted through the variablewavelength interference filter.
 3. The inspection apparatus according toclaim 1, further comprising: an imaging holding arm that holds thespectroscopic imager and is relatively movable with respect to theinspection object.
 4. The inspection apparatus according to claim 3,wherein the spectroscopic imager is held by the imaging holding arm viaa buffer material.
 5. The inspection apparatus according to claim 1,further comprising: a transport arm that transports the inspectionobject, wherein the transport arm has a gripping portion that grips theinspection object, and an imaging holder that holds the spectroscopicimager at a position opposite to the inspection object gripped by thegripping portion.
 6. The inspection apparatus according to claim 5,wherein the spectroscopic imager is held by the imaging holder via abuffer material.
 7. The inspection apparatus according to claim 1,further comprising: a transport arm that transports the inspectionobject; a transport controller that controls driving of the transportarm; and a vision controller that is provided with a spectroscopiccontroller which controls the spectroscopic imager, the shape inspectionunit, and the color inspection unit.
 8. The inspection apparatusaccording to claim 7, wherein the transport controller controls thedriving of the transport arm based on an input signal input from thevision controller and transports the inspection object to a positionaccording to a shape inspection result of the shape inspection unit anda color inspection result of the color inspection unit.
 9. Theinspection apparatus according to claim 8, wherein the transportcontroller transports the inspection object to a first transportposition in a case where a defect having a predetermined size or largeris detected by the shape inspection unit, transports the inspectionobject to a second transport position in a case where a defect havingthe predetermined size or larger is not detected by the shape inspectionunit and chromaticity detected by the color inspection unit is out of apredetermined reference range, and transports the inspection object to athird transport position in a case where a defect having thepredetermined size or larger is not detected by the shape inspectionunit and chromaticity detected by the color inspection unit is withinthe reference range.
 10. The inspection apparatus according to claim 1,further comprising: a reference object with known optical propertieswith respect to a wavelength of the light spectroscopically separated bythe spectroscopic imager.
 11. The inspection apparatus according toclaim 1, wherein the shape inspection unit inspects the shape using thespectroscopic image of a shortest wavelength among the spectroscopicimages of each of the wavelengths.
 12. The inspection apparatusaccording to claim 1, wherein the shape inspection unit inspects theshape using the spectroscopic image corresponding to a wavelength atwhich a light quantity of the light from the inspection object peaks.13. An inspection system comprising: the inspection apparatus accordingto claim 1; and a transport mechanism that transports the inspectionobject inspected by the inspection apparatus to a predeterminedposition.
 14. An inspection system comprising: the inspection apparatusaccording to claim 2; and a transport mechanism that transports theinspection object inspected by the inspection apparatus to apredetermined position.
 15. An inspection system comprising: theinspection apparatus according to claim 3; and a transport mechanismthat transports the inspection object inspected by the inspectionapparatus to a predetermined position.
 16. An inspection systemcomprising: the inspection apparatus according to claim 4; and atransport mechanism that transports the inspection object inspected bythe inspection apparatus to a predetermined position.
 17. An inspectionsystem comprising: the inspection apparatus according to claim 5; and atransport mechanism that transports the inspection object inspected bythe inspection apparatus to a predetermined position.
 18. An inspectionsystem comprising: the inspection apparatus according to claim 6; and atransport mechanism that transports the inspection object inspected bythe inspection apparatus to a predetermined position.
 19. The inspectionsystem according to claim 13, further comprising: a display correctionunit that corrects a display color of an image displayed on theinspection object in a case where the inspection object displays theimage by self-illumination, wherein the transport mechanism transportsthe inspection object to the display correction unit in a case where adefect having a predetermined size or larger is not detected by theshape inspection unit and chromaticity detected by the color inspectionunit is out of a predetermined reference range.
 20. An inspection methodcomprising: spectroscopically separating light from a predeterminedimaging range of an inspection object into light of a plurality ofwavelengths and imaging spectroscopic images of each of the wavelengths;inspecting a shape of the inspection object using a spectroscopic imageof a predetermined wavelength among the spectroscopic images of each ofthe wavelengths imaged in the imaging of the spectroscopic images ofeach of the wavelengths; and inspecting a color of the inspection objectusing the spectroscopic images of each of the wavelengths imaged in theimaging of the spectroscopic images of each of the wavelengths.